immersion lithography

基本解释

By comparing to the summarized competing next-generation lithography (NGL) technologies, the advantages of immersion lithography were presented.
概括了具有竞争力的下一代光刻技术，并对比了浸没式光刻的优势；
It will also use copper interconnects, low-k, strain silicon and other features. Like 32-nm, Intel will make use of 193-nm immersion lithography.
这款产品将使用Intel第三代HKMG工艺，第五代硅应变技术，另外与32nm类似，22nm制程仍将继续使用193nm液浸式光刻技术。
An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed.
本发明公开一种设备和方法，用于在更换平板印刷机（10）中工件（208）期间，将浸没流体（212）保持在邻接投射透镜（16）的间隙中。
ip.com

Immersion lithography has been used in production since 2004, but Intel will be pushing this technology to the extreme.
FORBES: Stimulating Technology
Inside those arenas the key to building the next generation of tiny chips is a technique known as immersion lithography.
FORBES: Magazine Article
Rival chipmakers switched to immersion lithography before Intel did.
FORBES: Magazine Article